Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5679165 | Apparatus for manufacturing semiconductor device | Kazuo Maeda, Hiroshi Chino | 1997-10-21 |
| 5620523 | Apparatus for forming film | Kazuo Maeda, Yuhko Nishimoto | 1997-04-15 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5679165 | Apparatus for manufacturing semiconductor device | Kazuo Maeda, Hiroshi Chino | 1997-10-21 |
| 5620523 | Apparatus for forming film | Kazuo Maeda, Yuhko Nishimoto | 1997-04-15 |