Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5700326 | Microwave plasma processing apparatus | Kazumasa Takatsu, Takashi Kurokawa, Akio Koganei, Shuichiro Sugiyama, Toshio Adachi | 1997-12-23 |
HE
Hiroshi Echizen
Overall (1997): #142,579 of 185,788Top 80%
1
Patents 1997