Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5688366 | Etching method, method of producing a semiconductor device, and etchant therefor | Satoshi Shinkura, Akio Hasebe, Tsutomu Murakami | 1997-11-18 |
| 5681402 | Photovoltaic element | Akio Hasebe, Tsutomu Murakami, Satoshi Shinkura, Yukie Ueno | 1997-10-28 |