Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5703692 | Lens scatterometer system employing source light beam scanning means | S. Sohail H. Naqvi, Scott Wilson | 1997-12-30 |
| 5674652 | Diffracted light from latent images in photoresist for exposure control | Kenneth P. Bishop, Steven R. J. Brueck, Susan M. Gaspar, Kirt C. Hickman, S. Sohail H. Naqvi +2 more | 1997-10-07 |