Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5652022 | Method and apparatus for the production of metal-free areas during metal vapor deposition | Thomas Vogt, Gunter Klemm, Detlef Eller | 1997-07-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5652022 | Method and apparatus for the production of metal-free areas during metal vapor deposition | Thomas Vogt, Gunter Klemm, Detlef Eller | 1997-07-29 |