Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5683560 | Cathode assembly | Joachim Szczyrbowski | 1997-11-04 |
| 5662784 | Apparatus for applying thin layers to a substrate | Manfred Schuhmacher, Erwin Winter, Andreas Sauer | 1997-09-02 |
| 5616226 | Cathode assembly | Hans Kunz, Andreas Sauer, Manfred Schuhmacher, Joachim Szczyrbowski | 1997-04-01 |