Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5688381 | Magnetron atomization source and method of use thereof | Pius Gruenenfelder, Hans Hirscher, Walter Haag | 1997-11-18 |
| 5676810 | Target mounting-demounting arrangement | — | 1997-10-14 |