Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5684566 | Illumination system and method employing a deformable mirror and diffractive optical elements | — | 1997-11-04 |
| 5654540 | High resolution remote position detection using segmented gratings | Donald L. White, George G. Zipfel, Jr. | 1997-08-05 |
| 5631721 | Hybrid illumination system for use in photolithography | Gregg M. Gallatin, Mark Oskotsky, Frits Zernike | 1997-05-20 |
| 5596413 | Sub-micron through-the-lens positioning utilizing out of phase segmented gratings | Donald L. White, George G. Zipfel, Jr. | 1997-01-21 |