Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5614055 | High density plasma CVD and etching reactor | Kevin Fairbairn | 1997-03-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5614055 | High density plasma CVD and etching reactor | Kevin Fairbairn | 1997-03-25 |