Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5630917 | Cleaning of a PVD chamber containing a collimator | — | 1997-05-20 |
| 5607776 | Article formed by in-situ cleaning a Ti target in a Ti+TiN coating process | Mark Anthony Mueller, John C. Egermeier | 1997-03-04 |