Issued Patents 1997
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5668040 | Method for forming a semiconductor device electrode which also serves as a diffusion barrier | — | 1997-09-16 |
| 5665209 | Method for forming refractory metal nitride film | — | 1997-09-09 |
| 5645887 | Method for forming platinum silicide plugs | — | 1997-07-08 |
| 5607884 | Method for fabricating MOS transistor having source/drain region of shallow junction and silicide film | — | 1997-03-04 |
| 5604140 | Method for forming fine titanium nitride film and method for fabricating semiconductor element using the same | — | 1997-02-18 |
| 5599734 | Method for fabricating MOS transistor utilizing doped disposable layer | Sang-jin Choi | 1997-02-04 |
| 5591667 | Method for fabricating MOS transistor utilizing doped disposable layer | Sang-jin Choi | 1997-01-07 |