Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5641375 | Plasma etching reactor with surface protection means against erosion of walls | Petru N. Nitescu | 1997-06-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5641375 | Plasma etching reactor with surface protection means against erosion of walls | Petru N. Nitescu | 1997-06-24 |