Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5693179 | Contaminant reduction improvements for plasma etch chambers | Joseph Kava, Richard McGovern, Yan Rozenzon | 1997-12-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5693179 | Contaminant reduction improvements for plasma etch chambers | Joseph Kava, Richard McGovern, Yan Rozenzon | 1997-12-02 |