Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5696383 | Method and apparatus for measuring the curvature of wafers with beams of different wavelengths | — | 1997-12-09 |
| 5691648 | Method and apparatus for measuring sheet resistance and thickness of thin films and substrates | — | 1997-11-25 |
| 5670888 | Method for transporting and testing wafers | — | 1997-09-23 |