Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5644467 | Method and structure for improving gas breakdown resistance and reducing the potential of arcing in a electrostatic chuck | Robert Steger | 1997-07-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5644467 | Method and structure for improving gas breakdown resistance and reducing the potential of arcing in a electrostatic chuck | Robert Steger | 1997-07-01 |