Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5658123 | Container-less transfer of semiconductor wafers through a barrier between fabrication areas | Gerald L. Goff | 1997-08-19 |
| 5651798 | Workpiece monitoring process using a workpiece carrier having an identification code | Michael D. Smith | 1997-07-29 |