Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5612253 | Method for forming ordered titanium nitride and titanium silicide upon a semiconductor wafer using a three-step anneal process | Shyam Garg | 1997-03-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5612253 | Method for forming ordered titanium nitride and titanium silicide upon a semiconductor wafer using a three-step anneal process | Shyam Garg | 1997-03-18 |