Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5614446 | Holding apparatus, a metal deposition system, and a wafer processing method which preserve topographical marks on a semiconductor wafer | Seshadri Ramaswami | 1997-03-25 |
| 5597458 | Method for producing alloy films using cold sputter deposition process | John Sanchez, Paul R. Besser | 1997-01-28 |