Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5605602 | Method and device for removing a thin film from a wafer backside surface | — | 1997-02-25 |
| 5599425 | Predecomposition of organic chlorides for silicon processing | Andre Lagendijk | 1997-02-04 |