Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5616522 | Method of making a mark on a wafer such as a semiconductor wafer incorporating a buried structure | Franck Mallecot, Claude Artigue, Denis Leclerc, Francis Poingt, Fr ed eric Pommereau | 1997-04-01 |