Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5626775 | Plasma etch with trifluoroacetic acid and derivatives | David A. Roberts, Raymond Nicholas Vrtis, Arthur Kenneth Hochberg, Robert G. Bryant | 1997-05-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5626775 | Plasma etch with trifluoroacetic acid and derivatives | David A. Roberts, Raymond Nicholas Vrtis, Arthur Kenneth Hochberg, Robert G. Bryant | 1997-05-06 |