Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5603771 | Chemical vapor deposition apparatus activated by a microwave plasma | Ghislaine Seiberras, Claude Indrigo, Remy Mevrel, Michel Bejet, Claude Le Pennec | 1997-02-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5603771 | Chemical vapor deposition apparatus activated by a microwave plasma | Ghislaine Seiberras, Claude Indrigo, Remy Mevrel, Michel Bejet, Claude Le Pennec | 1997-02-18 |