KK

Kenichi Kubo

TL Tokyo Electron Limited: 1 patents #46 of 210Top 25%
Overall (1994): #106,038 of 165,921Top 65%
1
Patents 1994

Issued Patents 1994

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
5334302 Magnetron sputtering apparatus and sputtering gun for use in the same Yasuo Kobayashi, Koji Koizumi 1994-08-02