Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5328867 | Peroxide clean before buried contact polysilicon deposition | Sun-Chieh Chien | 1994-07-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5328867 | Peroxide clean before buried contact polysilicon deposition | Sun-Chieh Chien | 1994-07-12 |