Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5350428 | Electrostatic apparatus and method for removing particles from semiconductor wafers | Pierre Leroux | 1994-09-27 |
| 5343938 | Method and apparatus for thermally insulating a wafer support | — | 1994-09-06 |