Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5314597 | Sputtering apparatus with a magnet array having a geometry for a specified target erosion profile | — | 1994-05-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5314597 | Sputtering apparatus with a magnet array having a geometry for a specified target erosion profile | — | 1994-05-24 |