Issued Patents 1994
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5356477 | Device for providing a substrate with a surface layer from a vapor | — | 1994-10-18 |
| 5322710 | Method of providing a substrate with a surface layer from a vapor | — | 1994-06-21 |
| 5318752 | Method and apparatus for sampling a reactive atmosphere into a vacuum chamber of an analyzer | — | 1994-06-07 |
| 5310703 | Method of manufacturing a semiconductor device, in which photoresist on a silicon oxide layer on a semiconductor substrate is stripped using an oxygen plasma afterglow and a biased substrate | Lukas De Boer | 1994-05-10 |