Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5310426 | High-speed film forming method by microwave plasma chemical vapor deposition (CVD) under high pressure and an apparatus therefor | — | 1994-05-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5310426 | High-speed film forming method by microwave plasma chemical vapor deposition (CVD) under high pressure and an apparatus therefor | — | 1994-05-10 |