Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5354420 | Method for laser-assisted etching of III-V and II-VI semiconductor compounds using chlorofluorocarbon ambients | Stephen D. Russell, Douglas A. Sexton | 1994-10-11 |
| 5348609 | Method for laser-assisted silicon etching using halocarbon ambients | Stephen D. Russell, Douglas A. Sexton | 1994-09-20 |
| 5310989 | Method for laser-assisted etching of III-V and II-VI semiconductor compounds using chlorofluorocarbon ambients | Stephen D. Russell, Douglas A. Sexton | 1994-05-10 |