Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5324411 | Electrode plate for plasma etching | Masahiko Ichishima, Yasumi Sasaki, Masatoshi Kasahara, Ritsurou Makita | 1994-06-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5324411 | Electrode plate for plasma etching | Masahiko Ichishima, Yasumi Sasaki, Masatoshi Kasahara, Ritsurou Makita | 1994-06-28 |