Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5314603 | Plasma processing apparatus capable of detecting and regulating actual RF power at electrode within chamber | Kazuhiko Sugiyama, Masafumi Shimizu, Yukio Naito, Eiichi Nishimura | 1994-05-24 |