TO

Tetu Ohsawa

TL Tokyo Electron Limited: 1 patents #46 of 210Top 25%
TL Tokyo Electron Tohoku Limited: 1 patents #2 of 11Top 20%
Overall (1994): #61,119 of 165,921Top 40%
1
Patents 1994

Issued Patents 1994

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
5296412 Method of heat treating semiconductor wafers by varying the pressure and temperature 1994-03-22