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Noriyuki Anai

TL Tokyo Electron Kyushu Limited: 1 patents #8 of 29Top 30%
TL Tokyo Electron Limited: 1 patents #46 of 210Top 25%
Overall (1994): #87,065 of 165,921Top 55%
1
Patents 1994

Issued Patents 1994

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
5345639 Device and method for scrubbing and cleaning substrate Kouichi Tanoue, Shinzi Kitamura, Takami Satoh, Takayuki Tomoeda, Tatsuya Iwasaki +1 more 1994-09-13