Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5368684 | Etching method for a silicon-containing layer using hydrogen bromide | Yoshio Ishikawa, Hiroshi Kojima | 1994-11-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5368684 | Etching method for a silicon-containing layer using hydrogen bromide | Yoshio Ishikawa, Hiroshi Kojima | 1994-11-29 |