KA

Kazutsugu Aoki

TL Tokyo Electron Limited: 1 patents #46 of 210Top 25%
TL Tokyo Electron Tohoku Limited: 1 patents #2 of 11Top 20%
Overall (1994): #109,621 of 165,921Top 70%
1
Patents 1994

Issued Patents 1994

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
5352902 Method for controlling plasma surface-treatments with a plurality of photodetectors and optical filters — 1994-10-04