Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5357718 | Wafer rinsing apparatus | — | 1994-10-25 |
| 5283989 | Apparatus for polishing an article with frozen particles | Akiko Hisasue, Takaaki Fukumoto | 1994-02-08 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5357718 | Wafer rinsing apparatus | — | 1994-10-25 |
| 5283989 | Apparatus for polishing an article with frozen particles | Akiko Hisasue, Takaaki Fukumoto | 1994-02-08 |