HU

Harunori Ushikawa

TL Tokyo Electron Limited: 1 patents #46 of 210Top 25%
📍 Kofu, JP: #11 of 24 inventorsTop 50%
Overall (1994): #128,075 of 165,921Top 80%
1
Patents 1994

Issued Patents 1994

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
5310339 Heat treatment apparatus having a wafer boat — 1994-05-10