FH

Fumihiko Higuchi

TL Tokyo Electron Limited: 1 patents #46 of 210Top 25%
📍 Yokohama, MA: #9 of 16 inventorsTop 60%
Overall (1994): #134,818 of 165,921Top 85%
1
Patents 1994

Issued Patents 1994

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
5314573 Dry etching polysilicon using a bromine-containing gas Yoshio Fukasawa 1994-05-24