Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5376409 | Process and apparatus for the use of solid precursor sources in liquid form for vapor deposition of materials | Alain E. Kaloyeros, Bo Zheng | 1994-12-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5376409 | Process and apparatus for the use of solid precursor sources in liquid form for vapor deposition of materials | Alain E. Kaloyeros, Bo Zheng | 1994-12-27 |