Issued Patents 1994
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5369544 | Silicon-on-insulator capacitive surface micromachined absolute pressure sensor | — | 1994-11-29 |
| 5332469 | Capacitive surface micromachined differential pressure sensor | — | 1994-07-26 |
| 5316619 | Capacitive surface micromachine absolute pressure sensor and method for processing | — | 1994-05-31 |
| 5285131 | Vacuum-sealed silicon incandescent light | Richard S. Muller | 1994-02-08 |