Issued Patents 1994
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5374330 | Anisotropic barium strontium titanate etch | — | 1994-12-20 |
| 5318662 | Copper etch process using halides | — | 1994-06-07 |
| 5316895 | Photolithographic method using non-photoactive resins | — | 1994-05-31 |
| 5312516 | Anisotropic tantalum pentoxide etch | Howard R. Beratan, Scott R. Summerfelt | 1994-05-17 |
| 5279702 | Anisotropic liquid phase photochemical copper etch | — | 1994-01-18 |