Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5350427 | Wafer retaining platen having peripheral clamp and wafer lifting means | Richard J. Hertel | 1994-09-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5350427 | Wafer retaining platen having peripheral clamp and wafer lifting means | Richard J. Hertel | 1994-09-27 |