Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5352488 | Chemical vapor deposition process employing metal pentadienyl complexes | Richard D. Ernst | 1994-10-04 |
| 5277932 | CVD method for forming metal boride films using metal borane cluster compounds | — | 1994-01-11 |