Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5376225 | Method of forming fine structure on compound semiconductor with inclined ion beam etching | Shinichi Wakabayashi, Hitomaro Tougou | 1994-12-27 |
| 5372675 | Method for producing fine structure for electronic device | Shinichi Wakabayashi, Hitomaro Tougou | 1994-12-13 |
| 5316640 | Fabricating method of micro lens | Shinichi Wakabayashi, Hitomaro Tougou, Yoshimasa Ohki | 1994-05-31 |