Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5329354 | Alignment apparatus for use in exposure system for optically transferring pattern onto object | Masaki Yamamoto, Keishi Kubo, Ushio Sangawa, Hiroyuki Takeuchi | 1994-07-12 |