Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5300404 | Process for forming a positive pattern through deep ultraviolet exposure, heat treatment and development with TMAH solution containing an alcohol to improve adhesion | Yoshiyuki Tani | 1994-04-05 |
| 5275921 | Pattern forming process | Taichi Koizumi, Yoshiyuki Tani | 1994-01-04 |