Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5302803 | Apparatus and method for uniform microwave plasma processing using TE.sub.1 1 .sub.01 modes | James E. Stevens | 1994-04-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5302803 | Apparatus and method for uniform microwave plasma processing using TE.sub.1 1 .sub.01 modes | James E. Stevens | 1994-04-12 |