Toshiharu Yanagida

SO Sony: 5 patents #11 of 1,124Top 1%

📍 Tokyo, MO: #4 of 46 inventorsTop 9%

Overall (1994): #2,386 of 165,921Top 2%

Patents 1994

Issued Patents 1994

Showing 1–5 of 5 patents

Patent #	Title	Co-Inventors	Date
5376228	Dry etching method	—	1994-12-27
5376234	Dry etching method	—	1994-12-27
5362350	Method for etching in dry process	—	1994-11-08
5338399	Dry etching method	—	1994-08-16
5314575	Etching method and apparatus	—	1994-05-24