Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5352248 | Pyrometer temperature measurement of plural wafers stacked on a processing chamber | Michael S. Kolesa | 1994-10-04 |
| 5350899 | Semiconductor wafer temperature determination by optical measurement of wafer expansion in processing apparatus chamber | Michael S. Kolesa | 1994-09-27 |