Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5368993 | Method of forming relief image having line width less than 0.35 microns utilizing copolymer binder having phenolic and nonaromatic cyclic alcohol units | Mark D. Denison, George W. Orsula | 1994-11-29 |
| 5362600 | Radiation sensitive compositions comprising polymer having acid labile groups | Roger F. Sinta, Richard C. Hemond, David R. Medeiros, Martha M. Rajaratnam, Dianne Canistro | 1994-11-08 |
| 5340696 | Photoresist compositions with copolymer binder having phenolic and nonaromatic cyclic alcohol units where the distribution of the cyclic alcohol concentration is less than 8 mole percent | Mark D. Denison, George W. Orsula | 1994-08-23 |